Micromachined CMOS Compatible RF Magnetic Materials and Devices

We discuss our recent progress in radio frequency magnetic materials and devices implemented by micro/nano machining. Metaconductors consisting of ferromagnetic and non-ferromagnetic superlattice show superior signal integrity to the solid copper counterpart in X and K bands. RF loss, dispersion, noise performance, and reliability of the metaconductors are discussed. Also, self-biasing ferrimagnetic based nanocomposites are prepared in sub 100 deg C and their RF characteristics and potentials for integrable microwave/mm-wave applications are discussed.